Semiconductor Rubber Seals: Cleanroom & High-Purity Guide In semiconductor fabs, a single particle or extractable outgassed from a seal can ruin a wafer batch worth thousands of dollars. Semiconductor rubber seals therefore must meet cleanroom, ultra-low-outgassing, and broad-chemical-resistance requirements that ordinary industrial elastomers cannot. This guide covers which materials to specify for wet benches, CMP, […]
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